Optimization of Thermoelastic Damping in Micro-Electromechanical Systems for Enhanced Performance
### Introduction Micro-Electromechanical Systems (MEMS) are miniature devices that integrate electrical and mechanical components at the microscale. These systems are instrumental in a myriad of applications including sensors, actuators, and resonators. A prevalent challenge in MEMS design is thermoelastic damping (TED), an intrinsic energy loss mechanism where thermal conduction results in reduced mechanical energy. This […]







